Inventor
BROUNS DERK SERVATIUS GERTRUDA
BE22 patents
Patents
22 patentsUS10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US10571800B2Feb 25, 2020
Mask assembly and associated methods
ASML NETHERLANDS BV9 citations82
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US11635681B2Apr 25, 2023
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11029595B2Jun 8, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US11086213B2Aug 10, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations69
US10139725B2Nov 27, 2018
Lithographic apparatus
ASML NETHERLANDS BV6 citations69
US11474438B2Oct 18, 2022
Inspection apparatus
ASML NETHERLANDS BV2 citations66
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11036128B2Jun 15, 2021
Membrane assembly
ASML NETHERLANDS BV0 citations61
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US11906907B2Feb 20, 2024
Apparatus and method for determining a condition associated with a pellicle
ASML NETHERLANDS BV0 citations59
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US12124176B2Oct 22, 2024
Inspection apparatus
ASML NETHERLANDS BV0 citations56
US12449726B2Oct 21, 2025
Apparatus for assembly of a reticle assembly
ASML NETHERLANDS BV0 citations48