Inventor
TSURUDA TOYOHISA
JP21 patents
⚠️ This page may combine multiple inventors who share the name “TSURUDA TOYOHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
18 patentsUS12123778B2Oct 22, 2024
Thermal imaging sensor for integration into track system
TOKYO ELECTRON LTD2 citations72
US12406350B2Sep 2, 2025
Estimation model creation device, estimation model creation method, and storage medium
TOKYO ELECTRON LTD0 citations62
US12300526B2May 13, 2025
Substrate processing control method, substrate processing apparatus and storage medium
TOKYO ELECTRON LTD0 citations62
US12051189B2Jul 30, 2024
Estimation model creation device, estimation model creation method, and storage medium
TOKYO ELECTRON LTD1 citations62
US11862496B2Jan 2, 2024
Substrate processing control method, substrate processing apparatus and storage medium
TOKYO ELECTRON LTD0 citations62
US10211050B2Feb 19, 2019
Method for photo-lithographic processing in semiconductor device manufacturing
TOKYO ELECTRON LTD1 citations61
US10937673B2Mar 2, 2021
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD1 citations57
US11876022B2Jan 16, 2024
Substrate treatment method and substrate treatment system
TOKYO ELECTRON LTD0 citations52
US12467742B2Nov 11, 2025
Film thickness analysis method, film thickness analysis device and storage medium
TOKYO ELECTRON LTD0 citations51
US12228390B2Feb 18, 2025
Information processing apparatus, information processing method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US11703459B2Jul 18, 2023
System and method to calibrate a plurality of wafer inspection system (WIS) modules
TOKYO ELECTRON LTD0 citations51
US11636579B2Apr 25, 2023
Information processing method, information processing apparatus and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US11461885B2Oct 4, 2022
Substrate inspection method, substrate inspection system, and control apparatus
TOKYO ELECTRON LTD0 citations51
US10023477B2Jul 17, 2018
Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US11555691B2Jan 17, 2023
Substrate inspection system, substrate inspection method and recording medium
TOKYO ELECTRON LTD0 citations50
US11544864B2Jan 3, 2023
Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium
TOKYO ELECTRON LTD0 citations50
US12442635B2Oct 14, 2025
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations48
US10248030B2Apr 2, 2019
Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus
TOKYO ELECTRON LTD0 citations38