Inventor
SATYAVOLU NITIN BHARADWAJ
IN10 patents
Patents
10 patentsUS11817331B2Nov 14, 2023
Substrate holder replacement with protective disk during pasting process
APPLIED MATERIALS INC2 citations72
US11600507B2Mar 7, 2023
Pedestal assembly for a substrate processing chamber
APPLIED MATERIALS INC2 citations72
US11610799B2Mar 21, 2023
Electrostatic chuck having a heating and chucking capabilities
APPLIED MATERIALS INC2 citations69
US12494395B2Dec 9, 2025
Apparatus for controlling lift pin movement
APPLIED MATERIALS INC0 citations61
US12217982B2Feb 4, 2025
Isolated volume seals and method of forming an isolated volume within a processing chamber
APPLIED MATERIALS INC0 citations61
US12100614B2Sep 24, 2024
Apparatus for controlling lift pin movement
APPLIED MATERIALS INC0 citations61
US11955355B2Apr 9, 2024
Isolated volume seals and method of forming an isolated volume within a processing chamber
APPLIED MATERIALS INC1 citations61
US12043896B2Jul 23, 2024
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure
APPLIED MATERIALS INC0 citations59
US11674227B2Jun 13, 2023
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure
APPLIED MATERIALS INC0 citations59
US12509756B2Dec 30, 2025
Reduced substrate process chamber cavity volume
APPLIED MATERIALS INC0 citations51