Inventor

GOODWIN TIMOTHY

US2 patents

Patents

2 patents

US9709386B1Jul 18, 2017

Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry

KLA TENCOR CORP10 citations81

US9640449B2May 2, 2017

Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy

KLA TENCOR CORP5 citations71