Inventor

HUANG WEI-HSUANG

TW2 patents

Patents

2 patents

US6898471B1May 24, 2005

Multivariate RBR tool aging adjuster

TAIWAN SEMICONDUCTOR MFG12 citations75

US6893882B2May 17, 2005

Multivariate RBR tool aging detector

TAIWAN SEMICONDUCTOR MFG2 citations55