Inventor
MALDONADO-GARCIA MARIBEL
US7 patents
Patents
7 patentsUS12362169B2Jul 15, 2025
Methods and apparatus for low temperature silicon nitride films
APPLIED MATERIALS INC0 citations61
US11017997B2May 25, 2021
Methods and apparatus for low temperature silicon nitride films
APPLIED MATERIALS INC0 citations61
US12195851B2Jan 14, 2025
Thin layer deposition with plasma pulsing
APPLIED MATERIALS INC0 citations59
US11932940B2Mar 19, 2024
Silyl pseudohalides for silicon containing films
APPLIED MATERIALS INC0 citations59
US11800824B2Oct 24, 2023
Low temperature silicon nitride/silicon oxynitride stack film with tunable dielectric constant
APPLIED MATERIALS INC0 citations59
US11732356B2Aug 22, 2023
Multilayer encapsulation stacks by atomic layer deposition
APPLIED MATERIALS INC0 citations50
US12084771B2Sep 10, 2024
Control of liquid delivery in auto-refill systems
APPLIED MATERIALS INC0 citations41