Inventor
LO KIN PONG
US24 patents
⚠️ This page may combine multiple inventors who share the name “LO KIN PONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUSD858192SSep 3, 2019
Gas distribution plate
APPLIED MATERIALS INC18 citations93
USD1034491SJul 9, 2024
Edge ring
APPLIED MATERIALS INC17 citations92
US9845550B2Dec 19, 2017
Upper dome with injection assembly
APPLIED MATERIALS INC7 citations84
US10930543B2Feb 23, 2021
Thermal processing susceptor
APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018
Thermal processing susceptor
APPLIED MATERIALS INC7 citations83
US7655571B2Feb 2, 2010
Integrated method and apparatus for efficient removal of halogen residues from etched substrates
APPLIED MATERIALS INC11 citations80
US10727093B2Jul 28, 2020
Light pipe window structure for low pressure thermal processes
APPLIED MATERIALS INC3 citations73
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US11380575B2Jul 5, 2022
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC2 citations71
US11164737B2Nov 2, 2021
Integrated epitaxy and preclean system
APPLIED MATERIALS INC4 citations71
US11049719B2Jun 29, 2021
Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal
APPLIED MATERIALS INC3 citations71
US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC2 citations69
US12487121B2Dec 2, 2025
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US12400904B2Aug 26, 2025
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11927482B2Mar 12, 2024
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US10458040B2Oct 29, 2019
Upper dome with injection assembly
APPLIED MATERIALS INC1 citations62
US12266560B2Apr 1, 2025
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC0 citations61
US12125698B2Oct 22, 2024
Integrated epitaxy and preclean system
APPLIED MATERIALS INC0 citations61
US10971357B2Apr 6, 2021
Thin film treatment process
APPLIED MATERIALS INC0 citations61
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48