Inventor
HWANG BERNARD L
US17 patents
⚠️ This page may combine multiple inventors who share the name “HWANG BERNARD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUSD1034491SJul 9, 2024
Edge ring
APPLIED MATERIALS INC17 citations92
US11581408B2Feb 14, 2023
Method and apparatus for selective nitridation process
APPLIED MATERIALS INC1 citations72
US11017984B2May 25, 2021
Ceramic coated quartz lid for processing chamber
APPLIED MATERIALS INC2 citations72
US11380575B2Jul 5, 2022
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC2 citations71
US9831091B2Nov 28, 2017
Plasma treating a process chamber
APPLIED MATERIALS INC4 citations71
US12487121B2Dec 2, 2025
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US11927482B2Mar 12, 2024
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US9048190B2Jun 2, 2015
Methods and apparatus for processing substrates using an ion shield
APPLIED MATERIALS INC2 citations62
US12266560B2Apr 1, 2025
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC0 citations61
US12009178B2Jun 11, 2024
Ceramic coated quartz lid for processing chamber
APPLIED MATERIALS INC0 citations61
US11521830B2Dec 6, 2022
Ceramic coated quartz lid for processing chamber
APPLIED MATERIALS INC0 citations61
US10971357B2Apr 6, 2021
Thin film treatment process
APPLIED MATERIALS INC0 citations61
US10950698B2Mar 16, 2021
Method and apparatus for selective nitridation process
APPLIED MATERIALS INC0 citations61
US10290504B2May 14, 2019
Plasma treating a process chamber
APPLIED MATERIALS INC1 citations61