Inventor

REBSTOCK LUTZ

DE67 patents

⚠️ This page may combine multiple inventors who share the name “REBSTOCK LUTZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

REBSTOCK LUTZ

REBSTOCK LUTZ

Semiconductor cleaner systems and methods

Methods and apparatuses for roll-on coating

Semiconductor cleaner systems and methods

Removable compartments for workpiece stocker

Scalable stocker with automatic handling buffer

Workpiece stocker with circular configuration

Robot with gas flow sensor coupled to robot arm

Automatic handling buffer for bare stocker

Semiconductor stocker systems and methods

Container storage add-on for bare workpiece stocker

Scalable stockers with automatic handling buffer

Integrated gripper for workpiece transfer

Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers

Workpiece stocker with circular configuration

Semiconductor cleaner systems and methods

Methods and apparatuses for roll-on coating

Integrated handling system for semiconductor articles

Semiconductor cleaner systems and methods

Semiconductor stocker systems and methods

Redundantable robot assembly for workpiece transfer

Integrated cleaner and dryer system

Methods and apparatuses for roll-on coating

BROOKS AUTOMATION GERMANY GMBH

Automatic handling buffer for bare stocker

Semiconductor cleaner systems and methods

Semiconductor cleaner systems and methods

EUV reticle stocker and method of operating the same

Inspection system

Automatic handling buffer for bare stocker

Cleaning systems and methods for semiconductor substrate storage articles

Semiconductor stocker systems and methods

Workpiece stocker with circular configuration

Core module for semiconductor production facility machinery

Method for cleaning a synthetic surface

Semiconductor stocker systems and methods

BROOKS CCS GMBH

Semiconductor cleaner systems and methods

Recirculation substrate container purging systems and methods

Container storage add-on for bare workpiece stocker

Container storage add-on for bare workpiece stocker

Integrated gripper for workpiece transfer

Humidity control in semiconductor systems

BROOKS AUTOMATION GMBH

Reticle compartment and diffusor plate

Semiconductor cleaner systems and methods

Reticle compartment and diffusor plate

DYNAMIC MICRO SYSTEMS

Substrate carrier having drip edge configurations

Method for operating equipment using buffer station having emergency access

BROOKS AUTOMATION (GERMANY) GMBH

Recirculation substrate container purging systems

Automatic handling buffer for bare stocker

Dynamic Micro System Semiconductor Equipment GmbH

Integrated gripper for workpiece transfer

MORAN THOMAS J

Method and apparatus for cleaning articles used in the production of semiconductors

DYNAMIC MICRO SYSTEMS SEMICONDUCTOR EQUIPMENT GMBH

Scalable stockers with automatic handling buffer