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Inventor
KIM POONG
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KIM POONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SATO MOTONORI
1 patent
US8580053B2
Nov 12, 2013
Ta sputtering target and method for producing the same
SATO MOTONORI
4 citations
52
VACUUM METALLURG CO LTD
1 patent
US6723213B2
Apr 20, 2004
Titanium target assembly for sputtering and method for preparing the same
VACUUM METALLURG CO LTD
6 citations
49