Inventor
DILLIWAY GABRIELA
DE2 patents
Patents
2 patentsUS8853752B2Oct 7, 2014
Performance enhancement in transistors by providing a graded embedded strain-inducing semiconductor region with adapted angles with respect to the substrate surface
GLOBALFOUNDRIES INC5 citations69
US10109492B2Oct 23, 2018
Method of forming a high quality interfacial layer for a semiconductor device by performing a low temperature ALD process
GLOBALFOUNDRIES INC0 citations43