Inventor · disambiguated record
Uwe Mühlfeld
Also filed as: MUEHLFELD UWE · MÜHLFELD UWE
1 granted patent·1 pending application·17 citations·filing 2003–2013
38Inventor score
Technology areasC23C
Top patents by PatentIndex Score
2 records- 0169US7799179B2Sputtering cathode and device and method for coating a substrate with several layersSINGULUS TECHNOLOGIES AG·Filed 2003·Granted Sep 21, 2010·17 cites·19 claims
- 0239US2016002770A1Apparatus with neighboring sputter cathodes and method of operation thereofPIERALISI FABIO·Filed 2013·Application pending·0 cites
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