Inventor
CHUNG MING-CHING
TW9 patents
Patents
9 patentsUS9947753B2Apr 17, 2018
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10714576B2Jul 14, 2020
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12507458B2Dec 23, 2025
Semiconductor device with dielectric spacer liner on source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11670690B2Jun 6, 2023
Semiconductor device with dielectric spacer liner on source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12341055B2Jun 24, 2025
Method of manufacturing semiconductor devices and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11043573B2Jun 22, 2021
Method of fabricating tantalum nitride barrier layer and semiconductor device thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12362273B2Jul 15, 2025
Conductive structures and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10147799B2Dec 4, 2018
Method of fabricating tantalum nitride barrier layer and semiconductor device thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations47
US12557619B2Feb 17, 2026
Semiconductor structure including multiple barrier layers and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43