Inventor · disambiguated record

Kyu-Whan Chang

Also filed as: CHANG KYU-WHAN

1 granted patent·250 citations·filing 2004–2004

57Inventor score

Technology areasH10P

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0196US7488688B2Method of removing oxide layer and semiconductor manufacturing apparatus for removing oxide layerSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Feb 10, 2009·250 cites·19 claims

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Kyu-Whan Chang — Patent Inventor | PatentIndex