Inventor

Uehara Akane

JP2 patents

Patents

2 patents

US12330261B2Jun 17, 2025

Offset pore poromeric polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations45

US11667061B2Jun 6, 2023

Method of forming leveraged poromeric polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations45