Inventor

ONO EMIKO

JP2 patents

Patents

2 patents

US11435666B2Sep 6, 2022

Salt compound, chemically amplified resist composition, and patterning process

SHINETSU CHEMICAL CO1 citations55

US12032289B2Jul 9, 2024

Polymer, chemically amplified resist composition and patterning process

SHINETSU CHEMICAL CO0 citations47