Inventor

DAI YI-MING

TW33 patents

⚠️ This page may combine multiple inventors who share the name “DAI YI-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAI YI-MING

TAIWAN SEMICONDUCTOR MFG CO LTD

Deposition system and method

Metrology method in reticle transportation

Multi-functional shutter disk for thin film deposition chamber

Method for depositing target material in deposition chamber with tiltable workpiece holder

Deposition system and method

Deposition system and method

Semiconductor device and method of forming the same

Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber

Movable wafer holder for film deposition chamber having six degrees of freedom

Deposition system and method

Semiconductor device and method of forming the same

Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber

Apparatus for fabricating a semiconductor device with target sputtering and target sputtering method for fabricating the semiconductor device

Semiconductor device and method of forming the same

System and method for correcting non-ideal wafer topography

System and method for correcting non-ideal wafer topography

Metrology method in wafer transportation

Treatment system and method

Treatment system and method

System and method for monitoring and performing thin film deposition

System and method for correcting non-ideal wafer topography

Metrology method in wafer transportation

Apparatus and method for supplying chemical solution on semiconductor substrate

Photolithography tool and method thereof

TAIWAN SEMICONDUCTOR MFG

Method for fabricating microelectronic product with attenuated bond pad corrosion

Effective method to improve sub-micron color filter sensitivity

Color filter with resist material in scribe lines

Image sensor fabrication method and structure

Method and apparatus for solving mask precipitated defect issue

Phase shift photomask performance assurance method

System and method for photolithography in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG CO IN

Method and system for reducing and monitoring precipitated defects on masking reticles

WENG FU-TIEN

Image sensor