Inventor

DAVYDOVA NATALIA VIKTOROVNA

NL2 patents

Patents

2 patents

US9519224B2Dec 13, 2016

Lithographic apparatus and method

ASML NETHERLANDS BV2 citations56

US9798225B2Oct 24, 2017

Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method

ASML NETHERLANDS BV0 citations30