Inventor
GEMMA TAKASHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “GEMMA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS5898501AApr 27, 1999
Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens
NIKON CORP94 citations98
US6456382B2Sep 24, 2002
Interferometer that measures aspherical surfaces
NIKON CORP69 citations96
US6344898B1Feb 5, 2002
Interferometric apparatus and methods for measuring surface topography of a test surface
NIKON CORP79 citations95
US5563706AOct 8, 1996
Interferometric surface profiler with an alignment optical member
NIKON CORP65 citations94
US5561525AOct 1, 1996
Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop
NIKON CORP69 citations94
US7843550B2Nov 30, 2010
Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method
NIKON CORP17 citations92
US5504596AApr 2, 1996
Exposure method and apparatus using holographic techniques
NIKON CORP29 citations92
US7868997B2Jan 11, 2011
Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method
NIKON CORP5 citations73
US6008904ADec 28, 1999
Apparatus and methods for detecting and correcting distortion of interference fringes
NIKON CORP13 citations72
US10288489B2May 14, 2019
Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction
NIKON CORP4 citations69
US10571340B2Feb 25, 2020
Method and device for measuring wavefront using diffraction grating, and exposure method and device
NIKON CORP0 citations48