Inventor
IDENO YOSHIKAZU
JP2 patents
Patents
2 patentsUS12119219B2Oct 15, 2024
Film forming method, method for manufacturing semiconductor device, film forming device, and system for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations55
US11348794B2May 31, 2022
Semiconductor film forming method using hydrazine-based compound gas
TOKYO ELECTRON LTD0 citations46