Inventor

MATSUURA TSUKASA

JP4 patents

Patents

4 patents

US5065271ANov 12, 1991

Thin film magnetic head apparatus and method of manufacturing the same

MITSUBISHI ELECTRIC CORP70 citations93

US6528724B1Mar 4, 2003

Microdevice and its production method

MITSUBISHI ELECTRIC CORP30 citations89

US5161076ANov 3, 1992

Magnetic head slider suspension apparatus and method of fabrication

MITSUBISHI ELECTRIC CORP10 citations71

US7081370B2Jul 25, 2006

Silicon substrate apparatus and method of manufacturing the silicon substrate apparatus

MITSUBISHI ELECTRIC CORP6 citations61