Inventor
DOCKERY KEVIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “DOCKERY KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
4 patentsUS9631122B1Apr 25, 2017
Tungsten-processing slurry with cationic surfactant
CABOT MICROELECTRONICS CORP19 citations81
US9422455B2Aug 23, 2016
CMP compositions exhibiting reduced dishing in STI wafer polishing
CABOT MICROELECTRONICS CORP3 citations68
US9165489B2Oct 20, 2015
CMP compositions selective for oxide over polysilicon and nitride with high removal rate and low defectivity
CABOT MICROELECTRONICS CORP2 citations60
US9771496B2Sep 26, 2017
Tungsten-processing slurry with cationic surfactant and cyclodextrin
CABOT MICROELECTRONICS CORP1 citations49