Inventor

MATSUYAMA JINSHO

JP36 patents

Patents

36 patents

US6166319ADec 26, 2000

Multi-junction photovoltaic device with microcrystalline I-layer

CANON KK121 citations99

US6072117AJun 6, 2000

Photovoltaic device provided with an opaque substrate having a specific irregular surface structure

CANON KK128 citations98

US5913986AJun 22, 1999

Photovoltaic element having a specific doped layer

CANON KK101 citations98

US5720826AFeb 24, 1998

Photovoltaic element and fabrication process thereof

CANON KK132 citations98

US5252142AOct 12, 1993

Pin junction photovoltaic element having an I-type semiconductor layer with a plurality of regions having different graded band gaps

CANON KK149 citations98

US5421909AJun 6, 1995

Process for forming zinc oxide film and processes for producing semiconductor device substrate and photo-electricity generating device using the film

CANON KK69 citations96

US5716480AFeb 10, 1998

Photovoltaic device and method of manufacturing the same

CANON KK90 citations96

US5714010AFeb 3, 1998

Process for continuously forming a large area functional deposited film by a microwave PCVD method and an apparatus suitable for practicing the same

CANON KK80 citations96

US5527391AJun 18, 1996

Method and apparatus for continuously forming functional deposited films with a large area by a microwave plasma CVD method

CANON KK72 citations96

US5520740AMay 28, 1996

Process for continuously forming a large area functional deposited film by microwave PCVD method and apparatus suitable for practicing the same

CANON KK89 citations96

US5282902AFeb 1, 1994

Solar cell provided with a light reflection layer

CANON KK73 citations96

US5279679AJan 18, 1994

Multi-layered photovoltaic element having at least three unit cells

CANON KK67 citations96

US5259891ANov 9, 1993

Integrated type solar battery

CANON KK81 citations96

US5149375ASep 22, 1992

Apparatus for forming a deposited film of large area with the use of a plurality of activated gases separately formed

CANON KK65 citations96

US5114770AMay 19, 1992

Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method

CANON KK61 citations96

US5656098AAug 12, 1997

Photovoltaic conversion device and method for producing same

CANON KK93 citations95

US5527396AJun 18, 1996

Deposited film forming apparatus

CANON KK46 citations95

US5417770AMay 23, 1995

Photovoltaic device and a forming method thereof

CANON KK61 citations95

US6946858B2Sep 20, 2005

Method and apparatus for measuring photoelectric conversion device, and process and apparatus for producing photoelectric conversion device

CANON KK43 citations93

US6541754B2Apr 1, 2003

Method and apparatus for measuring photoelectric conversion characteristics of photoelectric conversion device

CANON KK19 citations93

US5591492AJan 7, 1997

Process for forming and etching a film to effect specific crystal growth from activated species

CANON KK27 citations93

US5510151AApr 23, 1996

Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space

CANON KK42 citations93

US5296036AMar 22, 1994

Apparatus for continuously forming a large area functional deposit film including microwave transmissive member transfer mean

CANON KK33 citations93

US5130170AJul 14, 1992

Microwave pcvd method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation

CANON KK41 citations93

US4995341AFeb 26, 1991

Microwave plasma CVD apparatus for the formation of a large-area functional deposited film

CANON KK31 citations93

US5846320ADec 8, 1998

Method for forming crystal and crystal article obtained by said method

CANON KK33 citations92

US5593497AJan 14, 1997

Method for forming a deposited film

CANON KK19 citations92

US5439533AAug 8, 1995

Photovoltaic device, method of producing the same and generating system using the same

CANON KK22 citations92

US6876187B2Apr 5, 2005

Method and apparatus for measuring photoelectric conversion characteristics

CANON KK18 citations84

US5279681AJan 18, 1994

Photovoltaic device with layer region containing germanium therin

CANON KK16 citations74

US4873125AOct 10, 1989

Method for forming deposited film

CANON KK7 citations74

US4877650AOct 31, 1989

Method for forming deposited film

CANON KK6 citations63

MATSUYAMA JINSHO

Patents

Multi-junction photovoltaic device with microcrystalline I-layer

Photovoltaic device provided with an opaque substrate having a specific irregular surface structure

Photovoltaic element having a specific doped layer

Photovoltaic element and fabrication process thereof

Pin junction photovoltaic element having an I-type semiconductor layer with a plurality of regions having different graded band gaps

Photovoltaic conversion device

Method of producing a microcrystal semiconductor thin film

Photovoltaic cell and method for manufacturing the same

Photovoltaic device

Process for forming zinc oxide film and processes for producing semiconductor device substrate and photo-electricity generating device using the film

Photovoltaic device and method of manufacturing the same

Process for continuously forming a large area functional deposited film by a microwave PCVD method and an apparatus suitable for practicing the same

Method and apparatus for continuously forming functional deposited films with a large area by a microwave plasma CVD method

Process for continuously forming a large area functional deposited film by microwave PCVD method and apparatus suitable for practicing the same

Solar cell provided with a light reflection layer

Multi-layered photovoltaic element having at least three unit cells

Integrated type solar battery

Apparatus for forming a deposited film of large area with the use of a plurality of activated gases separately formed

Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method

Photovoltaic conversion device and method for producing same

Deposited film forming apparatus

Photovoltaic device and a forming method thereof

Method and apparatus for measuring photoelectric conversion device, and process and apparatus for producing photoelectric conversion device

Method and apparatus for measuring photoelectric conversion characteristics of photoelectric conversion device

Process for forming and etching a film to effect specific crystal growth from activated species

Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space

Apparatus for continuously forming a large area functional deposit film including microwave transmissive member transfer mean

Microwave pcvd method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation

Microwave plasma CVD apparatus for the formation of a large-area functional deposited film

Method for forming crystal and crystal article obtained by said method

Method for forming a deposited film

Photovoltaic device, method of producing the same and generating system using the same

Method and apparatus for measuring photoelectric conversion characteristics

Photovoltaic device with layer region containing germanium therin

Method for forming deposited film

Method for forming deposited film