Inventor
NAKAGAWA YOSHITOMO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “NAKAGAWA YOSHITOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
16 patentsUS5334834AAug 2, 1994
Inductively coupled plasma mass spectrometry device
SEIKO INSTR INC68 citations95
US4874460AOct 17, 1989
Method and apparatus for modifying patterned film
SEIKO INSTR INC73 citations94
US4851097AJul 25, 1989
Apparatus for repairing a pattern film
SEIKO INSTR INC63 citations93
US5559337ASep 24, 1996
Plasma ion source mass analyzing apparatus
SEIKO INSTR INC34 citations92
US5477048ADec 19, 1995
Inductively coupled plasma mass spectrometer
SEIKO INSTR INC35 citations92
US4999492AMar 12, 1991
Inductively coupled plasma mass spectrometry apparatus
SEIKO INSTR INC48 citations92
US6002129ADec 14, 1999
Inductively coupled plasma mass spectrometric and spectrochemical analyzer
SEIKO INSTR INC21 citations91
US5804821ASep 8, 1998
Plasma ion source mass analyzer
SEIKO INSTR INC18 citations84
US6031379AFeb 29, 2000
Plasma ion mass analyzing apparatus
SEIKO INSTR INC17 citations83
US4930439AJun 5, 1990
Mask-repairing device
SEIKO INSTR INC21 citations82
US5773823AJun 30, 1998
Plasma ion source mass spectrometer
SEIKO INSTR INC10 citations73
US4902530AFeb 20, 1990
Method of correcting a pattern film
SEIKO INSTR INC16 citations73
US4874632AOct 17, 1989
Process for forming pattern film
SEIKO INSTR INC7 citations71
US5426299AJun 20, 1995
Inductive plasma mass spectrometer
SEIKO INSTR INC11 citations66
US5867262AFeb 2, 1999
Sample introducing device for inductively coupled plasma analyzer
SEIKO INSTR INC6 citations54
US5071671ADec 10, 1991
Process for forming pattern films
SEIKO INSTR INC1 citations50