Inventor
SHERMAN STEVEN J
US9 patents
Patents
9 patentsUS5417111AMay 23, 1995
Monolithic chip containing integrated circuitry and suspended microstructure
ANALOG DEVICES INC111 citations98
US5540095AJul 30, 1996
Monolithic accelerometer
ANALOG DEVICES INC145 citations97
US5345824ASep 13, 1994
Monolithic accelerometer
ANALOG DEVICES INC216 citations97
US6192757B1Feb 27, 2001
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC74 citations95
US6009753AJan 4, 2000
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC50 citations95
US5858809AJan 12, 1999
Conductive plane beneath suspended microstructure
ANALOG DEVICES INC69 citations95
US5847280ADec 8, 1998
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC84 citations95
US5640039AJun 17, 1997
Conductive plane beneath suspended microstructure
ANALOG DEVICES INC51 citations95
US5465604ANov 14, 1995
Method for adjusting sensitivity of a sensor
ANALOG DEVICES INC57 citations95