Inventor
TSANG ROBERT W K
US9 patents
Patents
9 patentsUS5417111AMay 23, 1995
Monolithic chip containing integrated circuitry and suspended microstructure
ANALOG DEVICES INC111 citations98
US5326726AJul 5, 1994
Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
ANALOG DEVICES INC156 citations98
US5620931AApr 15, 1997
Methods for fabricating monolithic device containing circuitry and suspended microstructure
ANALOG DEVICES INC122 citations97
US5540095AJul 30, 1996
Monolithic accelerometer
ANALOG DEVICES INC145 citations97
US5345824ASep 13, 1994
Monolithic accelerometer
ANALOG DEVICES INC216 citations97
US6192757B1Feb 27, 2001
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC74 citations95
US6009753AJan 4, 2000
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC50 citations95
US5847280ADec 8, 1998
Monolithic micromechanical apparatus with suspended microstructure
ANALOG DEVICES INC84 citations95
US5543013AAug 6, 1996
Method of forming a microstructure with bare silicon ground plane
ANALOG DEVICES INC8 citations72