Inventor

ABE YO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “ABE YO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US8029224B2Oct 4, 2011

Substrate transfer apparatus, substrate transfer method, and storage medium

TOKYO ELECTRON LTD14 citations82

US8565911B2Oct 22, 2013

Thermal processing apparatus, thermal processing method, and storage medium

TOKYO ELECTRON LTD2 citations58

ABE YO

1 patent

US8423175B2Apr 16, 2013

Thermal processing apparatus, thermal processing method, and storage medium

ABE YO9 citations76