Inventor
LIU CHUNG-CHIEH
TW2 patents
Patents
2 patentsUS6100202AAug 8, 2000
Pre deposition stabilization method for forming a void free isotropically etched anisotropically patterned doped silicate glass layer
TAIWAN SEMICONDUCTOR MFG51 citations84
US6005277ADec 21, 1999
ARC layer enhancement for reducing metal loss during via etch
TAIWAN SEMICONDUCTOR MFG18 citations81