Inventor
PARK CHUN-GEUN
KR16 patents
Patents
16 patentsUS5759755AJun 2, 1998
Semiconductor substrate containing anti-reflective layer
SAMSUNG ELECTRONICS CO LTD54 citations96
US5851727ADec 22, 1998
Photosensitive polymers and photoresist compositions containing the same
SAMSUNG ELECTRONICS CO LTD35 citations92
US5496770AMar 5, 1996
Method for manufacturing a semiconductor chip bump having improved contact characteristics
SAMSUNG ELECTRONICS CO LTD28 citations92
US5418186AMay 23, 1995
Method for manufacturing a bump on a semiconductor chip
SAMSUNG ELECTRONICS CO LTD95 citations92
US5733704AMar 31, 1998
Resist compositions for chemically amplified resists comprising a di(t-butyl)malonyl methyl side group in the base polymer
SAMSUNG ELECTRONICS CO LTD17 citations84
US6300036B1Oct 9, 2001
Photosensitive polymers and chemically amplified photoresist compositions using the same
SAMSUNG ELECTRONICS CO LTD13 citations82
US5593725AJan 14, 1997
Anti-reflective layer and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD15 citations82
US6103845AAug 15, 2000
Chemically amplified resist polymers
SAMSUNG ELECTRONICS CO LTD11 citations81
US5847063ADec 8, 1998
Resins for use in chemically amplified resists and manufacturing methods thereof
SAMSUNG ELECTRONICS CO LTD8 citations74
US6280903B1Aug 28, 2001
Chemically amplified resist composition
SAMSUNG ELECTRONICS CO LTD5 citations73
US6171754B1Jan 9, 2001
Chemically amplified resist compositions
SAMSUNG ELECTRONICS CO LTD5 citations73
US6114084ASep 5, 2000
Chemically amplified resist composition
SAMSUNG ELECTRONICS CO LTD6 citations73
US5981141ANov 9, 1999
Chemically amplified resists
SAMSUNG ELECTRONICS CO LTD13 citations70
US5856411AJan 5, 1999
Resins for use in chemically amplified resists and manufacturing methods thereof
SAMSUNG ELECTRONICS CO LTD2 citations63
US6713229B2Mar 30, 2004
Terpolymer for amplified resist
SAMSUNG ELECTRONICS CO LTD1 citations62
US6416927B1Jul 9, 2002
Chemically amplified resist compositions
SAMSUNG ELECTRONICS CO LTD1 citations62