Inventor
ANG TING CHEONG
SG49 patents
⚠️ This page may combine multiple inventors who share the name “ANG TING CHEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
38 patentsUS6492726B1Dec 10, 2002
Chip scale packaging with multi-layer flip chip arrangement and ball grid array interconnection
CHARTERED SEMICONDUCTOR MFG267 citations99
US6252290B1Jun 26, 2001
Method to form, and structure of, a dual damascene interconnect device
CHARTERED SEMICONDUCTOR MFG123 citations98
US6406975B1Jun 18, 2002
Method for fabricating an air gap shallow trench isolation (STI) structure
CHARTERED SEMICONDUCTOR MFG84 citations97
US6380106B1Apr 30, 2002
Method for fabricating an air gap metallization scheme that reduces inter-metal capacitance of interconnect structures
CHARTERED SEMICONDUCTOR MFG84 citations97
US6611024B2Aug 26, 2003
Method of forming PID protection diode for SOI wafer
CHARTERED SEMICONDUCTOR MFG44 citations96
US6110787AAug 29, 2000
Method for fabricating a MOS device
CHARTERED SEMICONDUCTOR MFG99 citations96
US6261917B1Jul 17, 2001
High-K MOM capacitor
CHARTERED SEMICONDUCTOR MFG78 citations95
US6787422B2Sep 7, 2004
Method of body contact for SOI mosfet
CHARTERED SEMICONDUCTOR MFG20 citations93
US6376379B1Apr 23, 2002
Method of hard mask patterning
CHARTERED SEMICONDUCTOR MFG25 citations93
US6303414B1Oct 16, 2001
Method of forming PID protection diode for SOI wafer
CHARTERED SEMICONDUCTOR MFG42 citations93
US6275089B1Aug 14, 2001
Low voltage controllable transient trigger network for ESD protection
CHARTERED SEMICONDUCTOR MFG45 citations93
US6177324B1Jan 23, 2001
ESD protection device for STI deep submicron technology
CHARTERED SEMICONDUCTOR MFG42 citations93
US6649517B2Nov 18, 2003
Copper metal structure for the reduction of intra-metal capacitance
CHARTERED SEMICONDUCTOR MFG31 citations92
US6319783B1Nov 20, 2001
Process to fabricate a novel source-drain extension
CHARTERED SEMICONDUCTOR MFG16 citations92
US6284609B1Sep 4, 2001
Method to fabricate a MOSFET using selective epitaxial growth to form lightly doped source/drain regions
CHARTERED SEMICONDUCTOR MFG22 citations92
US6248618B1Jun 19, 2001
Method of fabrication of dual gate oxides for CMOS devices
CHARTERED SEMICONDUCTOR MFG22 citations92
US6090691AJul 18, 2000
Method for forming a raised source and drain without using selective epitaxial growth
CHARTERED SEMICONDUCTOR MFG46 citations92
US6406994B1Jun 18, 2002
Triple-layered low dielectric constant dielectric dual damascene approach
CHARTERED SEMICONDUCTOR MFG31 citations91
US6406948B1Jun 18, 2002
Method for forming an ESD protection network for SOI technology with the ESD device formed in an underlying silicon substrate
CHARTERED SEMICONDUCTOR MFG33 citations91
US6300172B1Oct 9, 2001
Method of field isolation in silicon-on-insulator technology
CHARTERED SEMICONDUCTOR MFG22 citations91
US6214680B1Apr 10, 2001
Method to fabricate a sub-quarter-micron MOSFET with lightly doped source/drain regions
CHARTERED SEMICONDUCTOR MFG22 citations89
US6963113B2Nov 8, 2005
Method of body contact for SOI MOSFET
CHARTERED SEMICONDUCTOR MFG13 citations84
US6815823B2Nov 9, 2004
Copper metal structure for the reduction of intra-metal capacitance
CHARTERED SEMICONDUCTOR MFG13 citations84
US6582856B1Jun 24, 2003
Simplified method of fabricating a rim phase shift mask
CHARTERED SEMICONDUCTOR MFG13 citations84
US6465296B1Oct 15, 2002
Vertical source/drain contact semiconductor
CHARTERED SEMICONDUCTOR MFG14 citations83
US6416909B1Jul 9, 2002
Alternating phase shift mask and method for fabricating the alignment monitor
CHARTERED SEMICONDUCTOR MFG16 citations81
US6376319B2Apr 23, 2002
Process to fabricate a source-drain extension
CHARTERED SEMICONDUCTOR MFG13 citations74
US6653674B2Nov 25, 2003
Vertical source/drain contact semiconductor
CHARTERED SEMICONDUCTOR MFG11 citations73
US6764914B2Jul 20, 2004
Method of forming a high K metallic dielectric layer
CHARTERED SEMICONDUCTOR MFG6 citations72
US6492242B1Dec 10, 2002
Method of forming of high K metallic dielectric layer
CHARTERED SEMICONDUCTOR MFG8 citations72
US6486515B2Nov 26, 2002
ESD protection network used for SOI technology
CHARTERED SEMICONDUCTOR MFG9 citations72
US6495399B1Dec 17, 2002
Method of vacuum packaging a semiconductor device assembly
CHARTERED SEMICONDUCTOR MFG7 citations71
US6329253B1Dec 11, 2001
Thick oxide MOS device used in ESD protection circuit
CHARTERED SEMICONDUCTOR MFG9 citations71
US6143598ANov 7, 2000
Method of fabrication of low leakage capacitor
CHARTERED SEMICONDUCTOR MFG15 citations70
US6455384B2Sep 24, 2002
Method for forming MOSFET device having source/drain extension regions located underlying L shaped spacers
CHARTERED SEMICONDUCTOR MFG4 citations63
US6399431B1Jun 4, 2002
ESD protection device for SOI technology
CHARTERED SEMICONDUCTOR MFG3 citations63
US6803314B2Oct 12, 2004
Double-layered low dielectric constant dielectric dual damascene method
CHARTERED SEMICONDUCTOR MFG5 citations57
US6737739B2May 18, 2004
Method of vacuum packaging a semiconductor device assembly
CHARTERED SEMICONDUCTOR MFG0 citations49
SEMICONDUCTOR MFG INT SHANGHAI
5 patentsUS7456067B2Nov 25, 2008
Method with high gapfill capability for semiconductor devices
SEMICONDUCTOR MFG INT SHANGHAI12 citations84
US8026151B2Sep 27, 2011
Method with high gapfill capability for semiconductor devices
SEMICONDUCTOR MFG INT SHANGHAI4 citations63
US7989309B2Aug 2, 2011
Method of improving a shallow trench isolation gapfill process
SEMICONDUCTOR MFG INT SHANGHAI4 citations63
US7579271B2Aug 25, 2009
Method for forming low dielectric constant fluorine-doped layers
SEMICONDUCTOR MFG INT SHANGHAI3 citations63
US7910475B2Mar 22, 2011
Method for forming low dielectric constant fluorine-doped layers
SEMICONDUCTOR MFG INT SHANGHAI0 citations52
ANG TING CHEONG
4 patentsUS8187950B2May 29, 2012
Method of eliminating micro-trenches during spacer etch
ANG TING CHEONG3 citations61
US9029978B2May 12, 2015
Semiconductor trench structure having a silicon nitride layer overlaying an oxide layer
ANG TING CHEONG0 citations51
US8309456B2Nov 13, 2012
Method and system for metal barrier and seed integration
ANG TING CHEONG0 citations40
US8110502B2Feb 7, 2012
Method of improving adhesion strength of low dielectric constant layers
ANG TING CHEONG0 citations40