Inventor
GANTVARG EVGUENI
US3 patents
Patents
3 patentsUS6283692B1Sep 4, 2001
Apparatus for storing and moving a cassette
APPLIED MATERIALS INC474 citations97
US7637707B2Dec 29, 2009
Apparatus for storing and moving a cassette
APPLIED MATERIALS INC16 citations91
US6575737B1Jun 10, 2003
Method and apparatus for improved substrate handling
APPLIED MATERIALS INC45 citations91