Inventor
RAKOWSKI DONALD W
US5 patents
Patents
5 patentsUS6506653B1Jan 14, 2003
Method using disposable and permanent films for diffusion and implant doping
IBM27 citations91
US6670624B1Dec 30, 2003
Ion implanter in-situ mass spectrometer
IBM39 citations88
US6333245B1Dec 25, 2001
Method for introducing dopants into semiconductor devices using a germanium oxide sacrificial layer
IBM16 citations84
US6514840B2Feb 4, 2003
Micro heating of selective regions
IBM13 citations79
US6924200B2Aug 2, 2005
Methods using disposable and permanent films for diffusion and implantation doping
IBM10 citations72