Inventor
DEGUCHI YOICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “DEGUCHI YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS5542559AAug 6, 1996
Plasma treatment apparatus
TOKYO ELECTRON LTD254 citations99
US5665167ASep 9, 1997
Plasma treatment apparatus having a workpiece-side electrode grounding circuit
TOKYO ELECTRON LTD134 citations97
US6672779B2Jan 6, 2004
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD51 citations96
US6471422B2Oct 29, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD63 citations96
US6402401B1Jun 11, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD49 citations96
US5937223AAug 10, 1999
Processing apparatus
TOKYO ELECTRON LTD62 citations96
US5474641ADec 12, 1995
Processing method and apparatus thereof
TOKYO ELECTRON LTD57 citations96
US6837631B2Jan 4, 2005
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD28 citations92
US5923915AJul 13, 1999
Method and apparatus for processing resist
TOKYO ELECTRON LTD32 citations92
US5319216AJun 7, 1994
Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
TOKYO ELECTRON LTD52 citations89
US6969829B2Nov 29, 2005
Substrate processing apparatus
TOKYO ELECTRON LTD18 citations77
US6670287B2Dec 30, 2003
Coating method and coating apparatus
TOKYO ELECTRON LTD6 citations74
US6432842B2Aug 13, 2002
Coating method and coating apparatus
TOKYO ELECTRON LTD13 citations74
US6024502AFeb 15, 2000
Method and apparatus for processing substrate
TOKYO ELECTRON LTD10 citations74
US6990380B2Jan 24, 2006
Substrate processing apparatus and information storage apparatus and method
TOKYO ELECTRON LTD8 citations73
US7031792B2Apr 18, 2006
Processing apparatus and information storage apparatus and method
TOKYO ELECTRON LTD4 citations62