Inventor
HONGO AKIHISA
JP30 patents
Patents
30 patentsUS5728223AMar 17, 1998
Reactant gas ejector head and thin-film vapor deposition apparatus
EBARA CORP674 citations99
US6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US7682225B2Mar 23, 2010
Polishing apparatus and substrate processing apparatus
EBARA CORP46 citations96
US6419462B1Jul 16, 2002
Positive displacement type liquid-delivery apparatus
EBARA CORP169 citations96
US6036783AMar 14, 2000
Liquid material vaporizer apparatus and gas ejection device
EBARA CORP63 citations96
US5862605AJan 26, 1999
Vaporizer apparatus
EBARA CORP62 citations96
US6615854B1Sep 9, 2003
Wafer cleaning apparatus
EBARA CORP55 citations95
US6544585B1Apr 8, 2003
Method and apparatus for plating a substrate
EBARA CORP65 citations95
US6517894B1Feb 11, 2003
Method for plating a first layer on a substrate and a second layer on the first layer
EBARA CORP49 citations95
US6517689B1Feb 11, 2003
Plating device
EBARA CORP57 citations95
US6716330B2Apr 6, 2004
Electroless plating apparatus and method
EBARA CORP23 citations93
US6921466B2Jul 26, 2005
Revolution member supporting apparatus and semiconductor substrate processing apparatus
EBARA CORP48 citations92
US6365017B1Apr 2, 2002
Substrate plating device
EBARA CORP31 citations92
US6269548B1Aug 7, 2001
Spin processing apparatus
EBARA CORP22 citations92
US6627066B1Sep 30, 2003
Method of measuring the concentration of a leveler in a plating liquid
EBARA CORP22 citations91
US6558518B1May 6, 2003
Method and apparatus for plating substrate and plating facility
EBARA CORP36 citations91
US7862402B2Jan 4, 2011
Polishing apparatus and substrate processing apparatus
EBARA CORP10 citations84
US7172979B2Feb 6, 2007
Substrate processing apparatus and method
EBARA CORP15 citations84
US6730596B1May 4, 2004
Method of and apparatus for forming interconnection
EBARA CORP19 citations84
US6582580B1Jun 24, 2003
Substrate plating apparatus
EBARA CORP18 citations84
US6811658B2Nov 2, 2004
Apparatus for forming interconnects
EBARA CORP14 citations83
US6495004B1Dec 17, 2002
Substrate plating apparatus
EBARA CORP9 citations74
US7037853B2May 2, 2006
Wafer cleaning apparatus
EBARA CORP10 citations73
US7033463B1Apr 25, 2006
Substrate plating method and apparatus
EBARA CORP10 citations73
US6793794B2Sep 21, 2004
Substrate plating apparatus and method
EBARA CORP7 citations73
US6908534B2Jun 21, 2005
Substrate plating method and apparatus
EBARA CORP7 citations72
US6500317B1Dec 31, 2002
Plating apparatus for detecting the conductivity between plating contacts on a substrate
EBARA CORP8 citations72
US6929722B2Aug 16, 2005
Substrate plating apparatus
EBARA CORP2 citations63
US7297210B2Nov 20, 2007
Plating apparatus
EBARA CORP1 citations52
US7172683B2Feb 6, 2007
Method of managing a plating liquid used in a plating apparatus
EBARA CORP1 citations50