Inventor

MORIYAMA HIROFUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MORIYAMA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US6579373B2Jun 17, 2003

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD13 citations79

US6713405B2Mar 30, 2004

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD6 citations69

TOKYO KAGAKU KENKYUSHO KK

1 patent

US5770111AJun 23, 1998

Phosphor with afterglow characteristic

TOKYO KAGAKU KENKYUSHO KK107 citations90