Inventor
FALK GERTRUD
DE8 patents
⚠️ This page may combine multiple inventors who share the name “FALK GERTRUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
6 patentsUS6893972B2May 17, 2005
Process for sidewall amplification of resist structures and for the production of structures having reduced structure size
INFINEON TECHNOLOGIES AG280 citations97
US6770423B2Aug 3, 2004
Negative resist process with simultaneous development and silylation
INFINEON TECHNOLOGIES AG7 citations72
US6841332B2Jan 11, 2005
Photoresist compound and method for structuring a photoresist layer
INFINEON TECHNOLOGIES AG5 citations62
US6946236B2Sep 20, 2005
Negative resist process with simultaneous development and aromatization of resist structures
INFINEON TECHNOLOGIES AG2 citations61
US7018784B2Mar 28, 2006
Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity
INFINEON TECHNOLOGIES AG0 citations40
US6899997B2May 31, 2005
Process for modifying resist structures and resist films from the aqueous phase
INFINEON TECHNOLOGIES AG0 citations33