Inventor
KELKAR MUKUL
US11 patents
⚠️ This page may combine multiple inventors who share the name “KELKAR MUKUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6039834AMar 21, 2000
Apparatus and methods for upgraded substrate processing system with microwave plasma source
APPLIED MATERIALS INC242 citations99
US5844195ADec 1, 1998
Remote plasma source
APPLIED MATERIALS INC388 citations99
US6045618AApr 4, 2000
Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC130 citations98
US6079426AJun 27, 2000
Method and apparatus for determining the endpoint in a plasma cleaning process
APPLIED MATERIALS INC132 citations97
US6361707B1Mar 26, 2002
Apparatus and methods for upgraded substrate processing system with microwave plasma source
APPLIED MATERIALS INC39 citations96
US6230652B1May 15, 2001
Apparatus and methods for upgraded substrate processing system with microwave plasma source
APPLIED MATERIALS INC43 citations96
INTEL CORP
4 patentsUS6958658B2Oct 25, 2005
Circuit and method for generating a clock signal
INTEL CORP15 citations82
US6960950B2Nov 1, 2005
Circuit and method for generating a clock signal
INTEL CORP4 citations57
US7479777B2Jan 20, 2009
Circuitry and method to measure a duty cycle of a clock signal
INTEL CORP5 citations54
US7705620B2Apr 27, 2010
Measuring and identifying analog characteristics of a microelectronic component at a wafer level and a platform level
INTEL CORP0 citations37