Inventor

HARASHIMA NORIYUKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HARASHIMA NORIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC COATING CORP

3 patents

US6391791B1May 21, 2002

Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof

ULVAC COATING CORP33 citations90

US6685848B1Feb 3, 2004

Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereof

ULVAC COATING CORP6 citations71

US6844117B2Jan 18, 2005

Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

ULVAC COATING CORP3 citations59

MITSUBISHI ELECTRIC CORP

3 patents

US6881991B2Apr 19, 2005

Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP11 citations71

US7063922B2Jun 20, 2006

Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP0 citations49

US7001698B2Feb 21, 2006

Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP0 citations49