Inventor

SAKAMOTO SHOUICHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SAKAMOTO SHOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

3 patents

US6881991B2Apr 19, 2005

Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP11 citations71

US7063922B2Jun 20, 2006

Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP0 citations49

US7001698B2Feb 21, 2006

Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

MITSUBISHI ELECTRIC CORP0 citations49

ULVAC COATING CORP

2 patents

US6391791B1May 21, 2002

Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof

ULVAC COATING CORP33 citations90

US6685848B1Feb 3, 2004

Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereof

ULVAC COATING CORP6 citations71