Inventor

KANAI WATARU

JP3 patents

Patents

3 patents

US4401745AAug 30, 1983

Composition and process for ultra-fine pattern formation

TOKYO OHKA KOGYO CO LTD16 citations71

US4388397AJun 14, 1983

Photosensitive composition for dry development

TOKYO OHKA KOGYO CO LTD7 citations68

US4468447AAug 28, 1984

Photosensitive bisazide composition for dry development

TOKYO OHKA KOGYO CO LTD4 citations57