P

Inventor

OUELLET LUC

CA59 patents
⚠️ This page may combine multiple inventors who share the name “OUELLET LUC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DALSA SEMICONDUCTOR INC

25 patents
US6635509B1Oct 21, 2003

Wafer-level MEMS packaging

DALSA SEMICONDUCTOR INC297 citations99
US7365016B2Apr 29, 2008

Anhydrous HF release of process for MEMS devices

DALSA SEMICONDUCTOR INC204 citations96
US7144750B2Dec 5, 2006

Method of fabricating silicon-based MEMS devices

DALSA SEMICONDUCTOR INC44 citations95
US6602791B2Aug 5, 2003

Manufacture of integrated fluidic devices

DALSA SEMICONDUCTOR INC101 citations95
US6902656B2Jun 7, 2005

Fabrication of microstructures with vacuum-sealed cavity

DALSA SEMICONDUCTOR INC46 citations92
US6656528B2Dec 2, 2003

Method of making specular infrared mirrors for use in optical devices

DALSA SEMICONDUCTOR INC19 citations92
US7160752B2Jan 9, 2007

Fabrication of advanced silicon-based MEMS devices

DALSA SEMICONDUCTOR INC33 citations91
US7138293B2Nov 21, 2006

Wafer level packaging technique for microdevices

DALSA SEMICONDUCTOR INC54 citations87
US6896821B2May 24, 2005

Fabrication of MEMS devices with spin-on glass

DALSA SEMICONDUCTOR INC14 citations84
US6555441B2Apr 29, 2003

Method of aligning structures on opposite sides of a wafer

DALSA SEMICONDUCTOR INC17 citations84
US7291513B2Nov 6, 2007

Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgy

DALSA SEMICONDUCTOR INC19 citations77
US6749893B2Jun 15, 2004

Method of preventing cracking in optical quality silica layers

DALSA SEMICONDUCTOR INC9 citations69
US6537623B2Mar 25, 2003

Manufacture of silica waveguides with minimal absorption

DALSA SEMICONDUCTOR INC8 citations69
US6724967B2Apr 20, 2004

Method of making a functional device with deposited layers subject to high temperature anneal

DALSA SEMICONDUCTOR INC7 citations66
US7682860B2Mar 23, 2010

Protection capsule for MEMS devices

DALSA SEMICONDUCTOR INC7 citations63
US7579622B2Aug 25, 2009

Fabrication of MEMS devices with spin-on glass

DALSA SEMICONDUCTOR INC2 citations63
US7037745B2May 2, 2006

Method of making electrical connections to hermetically sealed MEMS devices

DALSA SEMICONDUCTOR INC5 citations63
US7459329B2Dec 2, 2008

Method of fabricating silicon-based MEMS devices

DALSA SEMICONDUCTOR INC4 citations61
US7614253B2Nov 10, 2009

Method of reducing stress-induced mechanical problems in optical components

DALSA SEMICONDUCTOR INC7 citations60
US6716476B2Apr 6, 2004

Method of depositing an optical quality silica film by PECVD

DALSA SEMICONDUCTOR INC5 citations60
US7807550B2Oct 5, 2010

Method of making MEMS wafers

DALSA SEMICONDUCTOR INC6 citations58
US6887514B2May 3, 2005

Method of depositing optical films

DALSA SEMICONDUCTOR INC2 citations58
US7341905B2Mar 11, 2008

Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices

DALSA SEMICONDUCTOR INC2 citations57
US6849491B2Feb 1, 2005

Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices

DALSA SEMICONDUCTOR INC2 citations57
US7799656B2Sep 21, 2010

Microchannels for BioMEMS devices

DALSA SEMICONDUCTOR INC0 citations52

MITEL CORP

13 patents

TRANZYME PHARMA INC

5 patents

IBM

3 patents

MARSAULT ERIC

2 patents

ZARLINK SEMICONDUCTOR INC

1 patent

DESLONGCHAMPS PIERRE

1 patent

Showing the top 50 of 59 patents by PatentIndex Score.