Inventor
ANTAKI ROBERT
CA6 patents
Patents
6 patentsUS7144750B2Dec 5, 2006
Method of fabricating silicon-based MEMS devices
DALSA SEMICONDUCTOR INC44 citations95
US6902656B2Jun 7, 2005
Fabrication of microstructures with vacuum-sealed cavity
DALSA SEMICONDUCTOR INC46 citations92
US7160752B2Jan 9, 2007
Fabrication of advanced silicon-based MEMS devices
DALSA SEMICONDUCTOR INC33 citations91
US6686214B2Feb 3, 2004
Method of aligning a photolithographic mask to a crystal plane
DALSA SEMICONDUCTOR INC17 citations76
US6770213B2Aug 3, 2004
Method of inspecting an anisotropic etch in a microstructure
DALSA SEMICONDUCTOR INC7 citations68
US7459329B2Dec 2, 2008
Method of fabricating silicon-based MEMS devices
DALSA SEMICONDUCTOR INC4 citations61