Inventor
CHANG CHRISTOPHER C
US26 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHRISTOPHER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS6805952B2Oct 19, 2004
Low contamination plasma chamber components and methods for making the same
LAM RES CORP135 citations98
US6537429B2Mar 25, 2003
Diamond coatings on reactor wall and method of manufacturing thereof
LAM RES CORP110 citations98
US6620520B2Sep 16, 2003
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
LAM RES CORP54 citations96
US6613442B2Sep 2, 2003
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
LAM RES CORP49 citations96
US6533910B2Mar 18, 2003
Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof
LAM RES CORP62 citations96
US7255898B2Aug 14, 2007
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
LAM RES CORP29 citations92
US6773751B2Aug 10, 2004
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
LAM RES CORP26 citations92
US7605086B2Oct 20, 2009
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
LAM RES CORP8 citations84
US6790242B2Sep 14, 2004
Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof
LAM RES CORP11 citations74
US7128804B2Oct 31, 2006
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
LAM RES CORP1 citations63
ARCUS TECHNOLOGY INC
6 patentsUS7628574B2Dec 8, 2009
Apparatus and method for processing substrates using one or more vacuum transfer chamber units
ARCUS TECHNOLOGY INC7 citations71
US7417399B2Aug 26, 2008
Integrated motor device and method of setting and reading driver configuration parameters using driver configuration data embedded in driver control signals
ARCUS TECHNOLOGY INC2 citations62
US7405532B2Jul 29, 2008
Microstepper motor device and method of controlling the device
ARCUS TECHNOLOGY INC4 citations62
US8030876B2Oct 4, 2011
Stepper motor device with compensating non-sinusoidal driving values and method of producing the driving values
ARCUS TECHNOLOGY INC3 citations59
US8368257B2Feb 5, 2013
Integrated linear brushless DC motor
ARCUS TECHNOLOGY INC0 citations41
US8044339B2Oct 25, 2011
Intensity-based optical encoder using digital diffractive optic regions
ARCUS TECHNOLOGY INC0 citations41
ARCUS TECH INC
5 patentsUS11870385B2Jan 9, 2024
Linear motors with embedded encoder
ARCUS TECH INC0 citations60
US11615659B2Mar 28, 2023
Motion system health management using multidimensional modeling using motor operational parameters
ARCUS TECH INC0 citations50
US11237212B2Feb 1, 2022
Multi-dimensional motion performance modeling and real-time monitoring of a motion system
ARCUS TECH INC0 citations50
US10935954B2Mar 2, 2021
Motion system health management using existing servo drive variables
ARCUS TECH INC0 citations50
US10910970B2Feb 2, 2021
Motor with internal encoder unit
ARCUS TECH INC0 citations50
CHANG CHRISTOPHER C
4 patentsUS7566863B2Jul 28, 2009
Optical encoder with diffractive encoder member
CHANG CHRISTOPHER C12 citations82
US9066024B2Jun 23, 2015
Multi-camera system and method of calibrating the multi-camera system
CHANG CHRISTOPHER C8 citations77
US8436293B2May 7, 2013
Optical encoder and method for measuring displacement information using multiple optical tracks of diffractive optical regions having different periodicities
CHANG CHRISTOPHER C1 citations51
US10244220B2Mar 26, 2019
Multi-camera time slice system and method of generating integrated subject, foreground and background time slice images
CHANG CHRISTOPHER C0 citations34