Inventor

HECTOR SCOTT D

US9 patents

⚠️ This page may combine multiple inventors who share the name “HECTOR SCOTT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FREESCALE SEMICONDUCTOR INC

3 patents

US7282307B2Oct 16, 2007

Reflective mask useful for transferring a pattern using extreme ultra violet (EUV) radiation and method of making the same

FREESCALE SEMICONDUCTOR INC23 citations92

US6986974B2Jan 17, 2006

Attenuated phase shift mask for extreme ultraviolet lithography and method therefore

FREESCALE SEMICONDUCTOR INC11 citations83

US7904869B2Mar 8, 2011

Method of area compaction for integrated circuit layout design

FREESCALE SEMICONDUCTOR INC2 citations58

EUV LLC

2 patents

US6492067B1Dec 10, 2002

Removable pellicle for lithographic mask protection and handling

EUV LLC75 citations95

US6815129B1Nov 9, 2004

Compensation of flare-induced CD changes EUVL

EUV LLC57 citations93

MOTOROLA INC

2 patents

US6673520B2Jan 6, 2004

Method of making an integrated circuit using a reflective mask

MOTOROLA INC15 citations83

US6001513ADec 14, 1999

Method for forming a lithographic mask used for patterning semiconductor die

MOTOROLA INC17 citations82

UNIV CALIFORNIA

1 patent

US6352803B1Mar 5, 2002

Coatings on reflective mask substrates

UNIV CALIFORNIA69 citations92

APPLE INC

1 patent

US12480988B2Nov 25, 2025

Systems and methods for silicon crack detection structure

APPLE INC0 citations56