P

Inventor

HEIL TILMANN

DE6 patents
⚠️ This page may combine multiple inventors who share the name “HEIL TILMANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US7345740B2Mar 18, 2008

Polarized radiation in lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV65 citations96
US7312852B2Dec 25, 2007

Polarized radiation in lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV5 citations62
US7929116B2Apr 19, 2011

Polarized radiation in lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations51

ZEISS CARL SMT AG

1 patent
US7800732B2Sep 21, 2010

Projection exposure method and projection exposure apparatus for microlithography

ZEISS CARL SMT AG9 citations83

HAUF MARKUS

1 patent
US8325322B2Dec 4, 2012

Optical correction device

HAUF MARKUS16 citations81

ZEISS CARL SMT GMBH

1 patent
US7999916B2Aug 16, 2011

Microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH2 citations59