Inventor

NASU YUICHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NASU YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO TECHXIV CORP

1 patent

US7537658B2May 26, 2009

Method for producing epitaxial silicon wafer

SUMCO TECHXIV CORP8 citations77

NASU YUICHI

1 patent

US8530801B2Sep 10, 2013

Method and apparatus for manufacturing semiconductor wafer

NASU YUICHI0 citations28