Inventor · disambiguated record

Soon Yoong Loh

Also filed as: LOH SOON YOONG

1 granted patent·30 citations·filing 2008–2008

44Inventor score

Technology areasH10P

Files withLOH SOON YOONG1

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1 record

0184US8153527B2Method for reducing sidewall etch residueLOH SOON YOONG·Filed 2008·Granted Apr 10, 2012·30 cites·18 claims

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