Inventor
NEGISHI NOBUYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NEGISHI NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS6842658B2Jan 11, 2005
Method of manufacturing a semiconductor device and manufacturing system
HITACHI LTD40 citations92
US6573190B1Jun 3, 2003
Dry etching device and dry etching method
HITACHI LTD19 citations92
US6551445B1Apr 22, 2003
Plasma processing system and method for manufacturing a semiconductor device by using the same
HITACHI LTD50 citations92
US6475918B1Nov 5, 2002
Plasma treatment apparatus and plasma treatment method
HITACHI LTD24 citations92
US6645870B2Nov 11, 2003
Process for fabricating semiconductor device
HITACHI LTD16 citations84
US7372582B2May 13, 2008
Method for fabrication semiconductor device
HITACHI LTD6 citations62
HITACHI HIGH TECH CORP
5 patentsUS9099349B2Aug 4, 2015
Semiconductor device manufacturing method
HITACHI HIGH TECH CORP8 citations83
US7371690B2May 13, 2008
Dry etching method and apparatus
HITACHI HIGH TECH CORP8 citations73
US10418224B2Sep 17, 2019
Plasma etching method
HITACHI HIGH TECH CORP3 citations71
US9960014B2May 1, 2018
Plasma etching method
HITACHI HIGH TECH CORP4 citations71
US7585776B2Sep 8, 2009
Dry etching method of insulating film
HITACHI HIGH TECH CORP2 citations60