Inventor

NASSER-GHODSI MEHRAN

US45 patents

⚠️ This page may combine multiple inventors who share the name “NASSER-GHODSI MEHRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NASSER-GHODSI MEHRAN

KLA TENCOR TECH CORP

Methods and apparatus for dishing and erosion characterization

Apparatus and method for e-beam dark imaging with perspective control

Methods and apparatus for electron beam inspection of samples

Methods and apparatus for electron beam inspection of samples

Charged particle microscopy using super resolution

Methods and systems for preparing a copper containing substrate for analysis

Calibration standard for a dual beam (FIB/SEM) machine

Sharpening metal carbide emitters

Integrated electron beam and contaminant removal system

Methods and apparatus for void characterization

Tungsten plug deposition quality evaluation method by EBACE technology

Calibration standard for a dual beam (FIB/SEM) machine

Use of ion implantation in chemical etching

Contamination pinning for auger analysis

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

Methods and apparatus for defect localization

Methods and systems for creating a recipe for a defect review process

Transverse magnetic field voltage isolator

KLA TENCOR CORP

Apparatus and methods for inspecting extreme ultra violet reticles

Multi-layer ceramic vacuum to atmosphere electric feed through

Method and instrument for chemical defect characterization in high vacuum

Apparatus and method for optical inspection, magnetic field and height mapping

Multi-column scanning electron microscopy system

Electron emitter device with integrated multi-pole electrode structure

Asymmetrical detector design and methodology

Auger electron spectrometer with applied magnetic field at target surface

Apparatus and methods for inspecting extreme ultra violet reticles

NASSER-GHODSI MEHRAN

Non-planar extractor structure for electron source

Background reduction system including louver

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

Electron generation and delivery system for contamination sensitive emitters

Electron generation and delivery system for contamination sensitive emitters

Methods and apparatus for electron beam assisted etching at low temperatures

EBARA CORP

Ion implantation with charge neutralization

Ion source

Broad range ion implanter

SHADMAN KHASHAYAR

Multiple-column electron beam apparatus and methods

Charged-particle energy analyzer

SEARS CHRISTOPHER

Permanent magnet lens array

VAEZ-IRAVANI MEHDI

In-situ differential spectroscopy

PLETTNER TOMAS

Apparatus and methods for forming an electrical conduction path through an insulating layer

TOTH GABOR

Transverse focusing action in hyperbolic field detectors

NEIL MARK

Auger elemental identification algorithm

GOTKIS YEHIEL

Sharp scattering angle trap for electron beam apparatus

KLA TECHNOLOGIES CORP

Transverse magnetic field voltage isolator