Inventor
LAFLAMME JR ARTHUR H
US9 patents
⚠️ This page may combine multiple inventors who share the name “LAFLAMME JR ARTHUR H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7651583B2Jan 26, 2010
Processing system and method for treating a substrate
TOKYO ELECTRON LTD558 citations97
US6558506B1May 6, 2003
Etching system and etching chamber
TOKYO ELECTRON LTD48 citations88
US7964058B2Jun 21, 2011
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD13 citations83
US7461614B2Dec 9, 2008
Method and apparatus for improved baffle plate
TOKYO ELECTRON LTD16 citations83
US7462243B2Dec 9, 2008
Chemical processing system and method
TOKYO ELECTRON LTD13 citations82
US6695318B2Feb 24, 2004
Electronic device processing equipment having contact gasket between chamber parts
TOKYO ELECTRON LTD3 citations60
US7743731B2Jun 29, 2010
Reduced contaminant gas injection system and method of using
TOKYO ELECTRON LTD3 citations59